Fabrication Insensitive Echelle Grating in Silicon on Insulator Platform

We demonstrate a compact, low crosstalk, low loss, and flat passband demultiplexer based on an echelle grating fabricated in the silicon-on-insulator (SOI) platform. The demonstrated 12 channel demultiplexer has an 8-nm channel spacing, 5.5-nm flat passband, 1.7-dB on-chip loss, and better than 25-dB optical crosstalk. By arranging the output waveguides very close to the zero degree angle of the echelle grating, the performance of the demonstrated device is made insensitive to the vertical angle of the grating facet. The fabricated devices have a very small footprint and have the potential to provide a low-cost demultiplexer solution for multichannel data transmission applications.