Effects of Oxide Electrode on PbZrxTi1-xO3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition

The effect of the RuO x /Pt multilayer electrode on the microstructure and ferroelectric properties of PbZr x Ti1- x O3 (x=0.52) prepared by metalorganic chemical vapor deposition (MOCVD) were studied. The variation of RuO x thickness resulted in changes in the RuO x surface morphology. These modifications of RuO x surfaces caused changes in the texture, surface morphology and ferroelectric properties of lead zirconate titanate (PZT) thin films deposited on the multilayer electrodes. The improvements in the ferroelectric properties were attributed to the altered microstructure. Remanent polarization (P r) and coercive voltage (V c) of the multilayer PZT capacitors were estimated to be 22 µ C/cm2 and 0.7 V at 5 V, respectively. The multilayer PZT capacitors did not degrade up to 1012 cycles at 2 V. In this study, the factors of the deposition of PZT on RuO x /Pt multilayer electrode by MOCVD were investigated and the integration process of the Pt/RuO x /PZT/RuO x /Pt capacitor was also discussed.