Tantalum oxide films on smooth, pure substrates can be deformed as much as 50% before fracture. On surfaces containing impurity particles the films contain many flaws which nucleate cracks after relatively little deformation. Zirconium oxide films showed some evidence of deformation, but much less than tantalum oxide. Aluminum oxide films showed no evidence of deformation.
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Bubar et al. (1966) studied this question.
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