Through theoretical calculations and experiments, three operation modes of lateral-field-excited piezoelectric bulk acoustic wave devices, which are referred to as the pure lateral field excitation (LFE), quasi-LFE, and pseudo-LFE modes, are presented. Several 4–6 MHz LFE devices with similar geometry using lithium niobate, lithium tantalate, and AT-cut quartz crystals are fabricated and tested in air and de-ionized water, respectively. The experimental results are in well agreement with the theoretical calculations.
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Wang et al. (2008) studied this question.
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