Efficient multiple beam ion optics for quantitative surface analysis: from simulations to a fully operational instrument

A new ion optics system was developed and experimentally tested, which allows for high-resolution multiple beam characterization of materials.This system enables: (1) efficient, quasi-simultaneous measurements of the mass spectra of laser post-ionized sputtered species and secondary ions as well as secondary electron imaging, that can be accompanied and assisted by (2) low energy ion milling and (3) in-situ optical imaging and laser desorption with submicron resolution.Altogether, this ion optics system provides a versatile, sensitive combination of an analytical mass spectrometer and ion, electron and optical microscopes, which can efficiently detect one out of four sample atoms consumed during the analysis.