1× N Multimode Interference Beam Splitter Design Techniques for On-Chip Optical Interconnections

We derive an analytical relation for the maximum number of output channels for high-performance multimode interference (MMI)-based 1 × N optical beam splitters for a given MMI width. Using eigenvalue-expansion-based simulation results, we validate the analytical relation. Experimental data from MMIs fabricated on silicon nanomembrane also confirm the effectiveness of the design methodology for on-chip optical beam splitter designs.