Fabrication and Characterization of Optical Micro-Electro-Mechanical System Scanning Devices Using BaTiO3-Based Lead-Free Piezoelectric-Coated Substrate Sheet by Aerosol Deposition

We demonstrated high-speed metal-based Lamb-wave-resonance piezoelectric-drive optical micro-electric-mechanical system (MEMS) scanning devices using lead-free piezoelectric direct coated substrate sheets. The BaTiO3-based lead-free piezoelectric direct coated substrate sheet prepared by aerosol deposition achieved a piezoelectric d 31 of approximately -138 pm/V. The metal-based optical scanning devices have a 1 mm circular mirror. Under the ambient air, the wide optical scanning angle of 58° and the high resonance frequency of 26.681 kHz were achieved at the applied voltage of less than 30 V.