The improvement of the electrical properties of a lead zirconate titanate (PZT) layer and the reduction of the processing temperature in the aerosol deposition method (ADM) using irradiation of a fast atom beam (FAB) and plasma were investigated. The remanent polarization of the PZT layer deposited with oxygen FAB irradiation on a stainless steel substrate and annealed at 400°C for 10 min was 15 µC/cm 2 which is 2 times higher than that without FAB irradiation. The dielectric permittivity ( ε ) at 1 kHz–1 MHz was also improved by 25–45% by FAB irradiation for PZT layers, both as-deposited at room temperature and annealed at up to 400°C.
No takes yet. Share an insight, caveat, or question.
Akedo et al. (2003) studied this question.
Synapse has enriched 5 related papers. Consider them for comparative context: