Structure and transport in high pressure oxygen sputter-deposited BaSnO3−δ

BaSnO3 has recently been identified as a high mobility wide gap semiconductor with significant potential for room temperature oxide electronics. Here, a detailed study of the high pressure oxygen sputter-deposition, microstructure, morphology, and stoichiometry of epitaxial BaSnO3 on SrTiO3(001) and MgO(001) is reported, optimized conditions resulting in single-phase, relaxed, close to stoichiometric films. Most significantly, vacuum annealing is established as a facile route to n-doped BaSnO3−δ, leading to electron densities above 1019 cm−3, 5 mΩ cm resistivities, and room temperature mobility of 20 cm2 V−1 s−1 in 300-Å-thick films on MgO(001). Mobility limiting factors, and the substantial scope for their improvement, are discussed.