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July 15, 1981Applied Physics Letters

Interaction between arsenic, hydrogen, and silicon matrix in doping of sputtered amorphous hydrogenated silicon

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MTM. ToulemondeCentre National de la Recherche ScientifiquePSP. SiffertSupélecADA. DeneuvilleCentre National de la Recherche Scientifique

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Toulemonde et al. (1981) studied this question.

synapsesocial.com/papers/6a9a546a131f74c08ca0baf4https://doi.org/10.1063/1.92643
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