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A series of growths conducted at different substrate temperatures and V:III ratios is analyzed by x-ray diffraction to determine composition. A metastable InAsN alloy plus pure InAs are obtained for temperatures in the range 450–500 °C and total V:III ratio of approximately unity. The InAs fraction in the alloy phase increases at lower temperatures, the maximum observed is 13%. For higher temperatures or higher V:III ratio only separated phases of InAs and InN are found.
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Beresford et al. (1998) studied this question.
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