Polarization-stable oxide-confined VCSELs with enhanced single-mode output power via monolithically integrated inverted grating reliefs

It has been proven experimentally that the single-mode output power of vertical-cavity surface-emitting lasers (VCSELs) can be increased significantly with an inverted surface relief and that a reliable polarization control can be achieved by a monolithically integrated surface grating for even highly multimode VCSELs. In this paper, for the first time we report on a combination of these two techniques, namely, an inverted grating relief to realize VCSELs with a stable polarization and an increased single-mode output power. A statistically relevant number of monolithic, oxide-confined 850-nm VCSELs is investigated. All devices with a grating relief have a stable polarization with its orientation defined by the grating grooves. On the other hand, 64% of the reference devices exhibit polarization switches. Concurrently, the maximum single-mode output power is enhanced by more than a factor of three. Within the entire range of implemented grating parameters, the worst grating relief device still delivers higher single-mode output power than the best reference device.