Conical diamond tips realized by a double-molding process for high-resolution profilometry and atomic force microscopy applications

High aspect ratio diamond tips with a small radius of curvature were fabricated by means of a double-molding process and hot-filament chemical vapor deposition of diamond. The tips proved to perfectly reproduce the geometry of anisotropically etched silicon tips, which were used as first mold. The diamond tips were mounted on stubs for contact profilometry imaging as well as transferred to cantilevers for atomic force microscopy measurements. Both profilometry and atomic force microscopy investigations have demonstrated the high application potential of these tips.