We fabricated a membrane buried heterostructure distributed feedback (BH-DFB) laser with an air-bridge structure by selectively etching a sacrificial layer. A continuous wave (CW) operation under optical pumping was attained from 10 up to 80 °C, and a minimum threshold pump power of 4.3 mW was obtained at 20 °C. From the pump-power dependence of the lasing wavelength, the thermal resistance of this air-bridge membrane structure was estimated to be 11 K/mW, which is approximately half that of a previously reported structure (23 K/mW) fabricated by direct wafer bonding on another InP substrate.
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Naitoh et al. (2007) studied this question.
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