Basic Parameters of Coplanar Discharge Ozone Generator

Coplanar discharge is a new type of barrier discharge, and has some advantages for high-concentration ozone generation. In this article, basic parameters of coplanar discharge are clarified by experimental and theoretical approaches. Coplanar electrodes consist of many pairs of line electrodes printed on a glass plane, and are covered with dielectric layer. The discharge properties, ozone diffusion process, and surface reaction are discussed. Finally, the scaling rule of a coplanar discharge ozone generator is demonstrated by fabrication of a 3 kg/h ozone generator.