The temporal evolution of the collisionless, pulsed plasma sheath around a square bar is studied using a two-dimensional particle-in-cell code. It is found that the incident ion dose is peaked near to, but not on, the corner. This effect is explained physically by considering ion trajectories across the sheath, yielding an estimate for the dose in good agreement with the simulation results. The present results are compared to those from a fluid simulation [T. E. Sheridan and M. J. Alport, Appl. Phys. Lett. 64, 1783 (1994)], and it is found that the fluid simulation erroneously underestimates the ion dose near the corner of the bar.
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T. E. Sheridan (1996) studied this question.