Electrical Properties of (Bi, La)4Ti3O12 Based Thin Films Prepared by RF Sputtering

We describe the preparation of (Bi, La)4Ti3O12 thin films on various substrates such as MgO, glass Pt(100)/ MgO(100) and Pt(111)/glass by rf magnetron sputtering. Perovskite-type thin films were prepared on these substrates. The chemical composition of the thin films was found to be (Bi3.56La0.57)Ti3O12 by ICP analysis. Thin film on Pt(100)/MgO(100) substrate showed fairly good fatigue properties: initial state, P r=7.5 µ C/cm2, E c=174 kV/cm and after 109 pulses, P r=5.7 µ C/cm2, E c=117 kV/cm.