The propagation of nonlinear surface acoustic wave (SAW) pulses was investigated in anisotropic single-crystal silicon. The effects of frequency-up and frequency-down conversion were found to depend on the plane and direction of SAW propagation, yielding a variety of waveforms. The formation of steep shock fronts that broke the covalent crystal was observed in the $〈112〉$ direction of the Si(111) plane. Solitary behavior of surface waves was studied by investigating the interaction between nonlinearity and dispersion for silicon covered with a thin oxide layer.
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Lomonosov et al. (1999) studied this question.
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