Quantitative surface analysis by XPS and XAS

As X‐ray excited Auger spectra are included in quantitative surface analysis a careful investigation of all possible excitation mechanisms must be made. For instruments with a monochromator there is only the specific characteristic radiation but instruments without a monochromator offer a wide variety of Auger excitations: white x‐radiation (target); satellites (target); O Kα (oxidized target); Cu Lα (target substrate); and Al Kα (tube window). The present paper deals with the quantification of additional X‐ray excitations of KLL‐Auger spectra from these sources. The numerical results illustrate our experimental situation. With these data it becomes possible to use X‐ray excited KLL‐Auger lines in a fundamental parameter approach for quantitative analysis.