Superconducting half-wave microwave resonator on YSZ buffered Si [100]

We have produced high quality superconducting half-wave microwave resonators on YBCO/YSZ/Si heterostructures. The YSZ was grown on [100] Si by pulsed dc magnetron sputtering at 820/spl deg/C in 37 mTorr Ar/O/sub 2/. YBCO was then deposited on the YSZ/Si by pulsed laser ablation at 760/spl deg/C in 0.5 Torr of O/sub 2/. A coplanar meander-line structure was patterned and its microwave characteristics measured. The results indicate Si to be a definite candidate for microwave applications producing Q values exceeding 50,000 at 4 GHz for T<30 K. The microwave properties compare favorably to those obtained from identical resonators patterned on normal metal and YBCO/LaAlO/sub 3/ at 30 K.