High-performance C60 thin-film field-effect transistors with parylene gate insulator

C 60 field-effect transistors (FETs) have been fabricated with parylene gate dielectric on Si∕SiO2, on polyethylene terephthalate, and commercially available transparent sheet substrates. The best performance of the C60 FET device is achieved with parylene as gate dielectric: field-effect mobility of 0.41cm2V−1s−1 and on-off ratio of ∼107. The excellent FET characteristics are recorded without any annealing, and the devices were kept in He atmosphere after an exposure to air. This result suggests the parylene gate dielectric to be highly H2O repellent. The mechanical flexibility and air-exposure effect were studied for the C60 FET with parylene gate dielectric.