This paper shows that leakage loss is an important loss mechanism in integrated optical trench-bulge waveguides. The propagation losses due to leakage can easily exceed 1 dB/cm in these waveguide geometries. By simply using a deeper trench or a cavity in the substrate to deposit the waveguide in, the leakage losses can be reduced dramatically.
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Krause et al. (2005) studied this question.
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