Thin film growth is governed by certain kinetic coefficients. The influence of thermal spikes from 10 to 1000 eV particles on film formation is estimated by calculating effective kinetic coefficients as spatiotemporal average over the arising fluctuating temperature field. Thermal spikes are found to activate growth kinetics considerably provided that particle energy and current density are sufficiently high, and the activation energy of kinetic processes exceeds a certain threshold Ec, typically Ec/kT ≈ 20. The effect is largest for particle energies ∼ 100 eV, depending on penetration depth.
No takes yet. Share an insight, caveat, or question.
Bobeth et al. (1990) studied this question.
Synapse has enriched 3 closely related papers on similar clinical questions. Consider them for comparative context: