Cantilever anemometer based on a superconducting micro-resonator: Application to superfluid turbulence

We present a new type of cryogenic local velocity probe that operates in liquid helium (1 K < T < 4.2 K) and achieves a spatial resolution of ≈ 0.1 mm. The operating principle is based on the deflection of a micro-machined silicon cantilever which reflects the local fluid velocity. Deflection is probed using a superconducting niobium micro-resonator sputtered on the sensor and used as a strain gauge. We present the working principle and the design of the probe, as well as calibration measurements and velocity spectra obtained in a turbulent helium flow above and below the superfluid transition.