Study of mechanically tunable superconducting microwave filter using lumped elements

We propose a mechanically tunable superconducting microwave filter based on lumped elements composed of planar meander-line inductors (L) and inter-digital capacitors (C). As the first step, we have designed and evaluated a 3-pole Chebyshev bandpass filters with lumped elements using a circuit simulator. It is found that the center frequency, bandwidth and skirt rejection of the filter can be controlled by changing only the capacitance. The L and C elements values are estimated using an electromagnetic simulator. Furthermore, we have fabricated the inter-digital capacitor designed with the above procedure. We have evaluated change of the C values using mechanical tuning as a step toward a tunable superconducting microwave filter.