Plasma deposition of thin carbonfluorine films on aligned carbon nanotube

The thin film of carbonfluorine was deposited on the surfaces of aligned carbon nanotubes using a plasma polymerization treatment. High-resolution transmission electron microscopy images revealed that a thin film of the polymer layer 20 nm was uniformly deposited on the surfaces of the aligned carbon nanotubes. Time-of-flight secondary ion mass spectroscopy and Fourier transform infrared experiments identified the carbonfluorine thin films on the carbon nanotubes. The plasma deposition mechanism is discussed.