On nonlinear effects in inductively coupled plasmas

Nonlinear current and potential oscillations in low pressure inductively coupled plasmas are analyzed within the framework of electron magnetohydrodynamics. It is shown that both current and potential oscillations can be attributed, respectively, to the solenoidal and potential components of nonlinear Lorentz and inertial forces. Scaling of the nonlinear force with the phase shift between the electric current and the electric field is analyzed. It is demonstrated that the solenoidal part of the force that provides a source of nonlinear current vanishes in neglect of collisions and collisionless absorption, while oscillations of the electrostatic potential remain finite. It is shown that these oscillations are the result of plasma polarization due to Hall drifts.