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December 9, 1996Applied Physics Letters

Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

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Authors

THTsukasa HoriOsaka University of EconomicsMBM. BowdenCulham Centre for Fusion EnergyKUKenji UchinoKyushu University

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Hori et al. (1996) studied this question.

synapsesocial.com/papers/6a9c5d7480b31b2c0d76dbb4https://doi.org/10.1063/1.117188
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