Plasma‐polymerizations of perfluoromethylcyclohexane (PFMCH)/methane (CH4) mixture were investigated by elemental analysis, infrared spectroscopy, and ESCA; and gas transport characteristics of the plasma‐films formed were studied. The addition of CH4 molecules to PFMCH accelerated defluorination to form plasma‐polymers poor in fluorocarbon units. The surface energy of the plasma‐polymers increased with increasing the CH4 concentration. The oxygen and nitrogen permeation coefficients (PO2 and PN2) and the PO2/PN2 ratio for the polymer films formed from the PFMCH/CH4 mixture depended on the CH4 concentration. The small CH4 addition was effective in improvement of the PO2 value and of the PO2/PN2 ratio, but the much addition was ineffective. The oxygen transport through the plasma‐polymers was discussed.
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Inagaki et al. (1986) studied this question.
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