We consider the charge state distribution of ions produced in the metal vapor vacuum arc plasma discharge. A high current metal ion source, the MEVVA ion source, in which the ion beam is extracted from a metal vapor vacuum arc plasma, has been used to obtain the spectra of multiple charged ions produced within the cathode spots. A computer calculation of the charge state distribution that evolves within the spots via stepwide ionization of ions by electron impact provides a theoretical basis for comparison of the data. In this paper we report on the measured charge state distributions for a wide variety of metallic species and compare these results with the predictions of this theory. 55 refs.
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I.G. Brown (1986) studied this question.
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