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A low-frequency (100 kHz) radio frequency discharge has been characterized by making time-resolved measurements of the basic plasma parameters, including the electron energy-distribution function. Measurements obtained when operating with H2, D2, and Ar are compared. Surprisingly low electron temperatures (∼0.2 eV) have been found in H2 and D2 discharges.
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Anderson et al. (1990) studied this question.
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