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October 7, 2015Journal of Micromechanics and Microengineering

Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators

Humberto Campanella Margarita Narducci Jeffrey Bo Woon Soon Srinivas Merugu Marco Ferrari Vittorio Ferrari Navab Singh

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Abstract

Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators, Campanella, Humberto, Narducci, Margarita, Soon, Jeffrey B W, Merugu, Srinivas, Ferrari, Marco, Ferrari, Vittorio, Singh, Navab

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Campanella et al. (2015) studied this question.

synapsesocial.com/papers/6a9c85303a49b5247f76e572 https://doi.org/10.1088/0960-1317/25/11/115016

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