RF-Designed High-Power Lamb-Wave Aluminum–Nitride Resonators

We report Lamb acoustic wave resonators that are suitable for RF applications and that exhibit high power handling at high frequencies above 1 GHz. Resonators use aluminum–nitride as acoustic layer and are fabricated in the Institute of Microelectronics (IME) Agency for Science, Technology and Research (A*STAR)'s in-house RF microelectromechanical system silicon-on-insulator platform. We focus the study on devices operating at their first symmetric Lamb-wave mode (S0) at 900 MHz and 1.5 GHz, although demonstrate 400 MHz and 1.2 GHz as well. All devices are realized in the same multi-frequency platform. Assessment of devices covers gain compression point (P1dB), third-order intermodulation intercept point (IIP3), thermal management, impedance matching, and quality factor. Devices exhibit P1dB above+30dBm, and IIP3 higher than+50dBm with low insertion losses less than 3 dB and 50-Ωimpedance matching.