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A temperature-controlled crystal oscillator installed in a vacuum chamber can be stabilised to within +or-0.05 degrees C at a preset temperature. The frequency shift of the oscillator due to film deposition is detected by a digital mixer implemented by application of AND and NOR gates and is then converted to a voltage by a transistor-diode pump. A linear dependence of voltage readout on film thickness to within 1% of linearity can be obtained.
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Juh Taeng Lue (1977) studied this question.
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