We describe a fabrication process for and the characterization of submicrometer-thick As2S3waveguides. Poly(methylmethacrylate) and bottom antireflective coating were employed as thin protective layers prior to photoresist patterning in order to prevent the attack of the As2S3film by an alkaline developer. Propagation losses of ~0.2 and 0.6 dB/cm were measured for 4- and 2-¿m-wide waveguides fabricated from 0.85-¿m-thick films. Slightly higher loss in the transverse-magnetic mode may be the result of surface scattering of the rougher etched sidewalls.
No takes yet. Share an insight, caveat, or question.
Choi et al. (2010) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: