Over 300 GHz bandwidth UTC‐PD module with 600 GHz band rectangular‐waveguide output

A hollow‐waveguide‐output uni‐travelling‐carrier photodiode (UTC‐PD) module operating at frequencies from 400 to 900 GHz has been developed. The module consists of a UTC‐PD, a photodiode‐to‐waveguide coupler, and a metallic package with a waveguide rectangular (WR)‐1.5 rectangular waveguide. The coupler is monolithically integrated with the UTC‐PD chip. The fabricated module exhibits the output power as high as −19 dBm at 500 GHz and the 3 dB bandwidth of 340 GHz, which is the widest among ever‐reported photodiode modules.