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May 1, 1994Journal of The Electrochemical Society

Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas

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Authors

FMFrank R. MyersMotorola (United States)MRManjula RamaswamiArizona State UniversityTCTimothy S. CaleUniversity of Minnesota

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Cite This Study

Myers et al. (1994) studied this question.

synapsesocial.com/papers/6a9ce26ba764fcb084e27973https://doi.org/10.1149/1.2054916
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