A very thin hydrocarbon coating layer of at most a few monolayers induced by the electronic scattering of MeV-He+ ion-beam irradiation effectively and completely suppresses oxidation of the compound semiconductor AlSb, which is liable to be oxidized by mere exposure to air, because of the coating layer’s hydrophobic property. Of the many kinds of hydrocarbons, alkyl and phenyl groups are particularly effective for oxidation suppression. The AlSb oxidation mechanism and oxidation suppression mechanism are discussed.
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Nakata et al. (1994) studied this question.
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