Investigation of Hydrophobicity Enhancement of Molybdenum Surfaces by Micromilling

Molybdenum (Mo), owing to its excellent high-temperature resistance and low sputtering yield, is widely used in advanced equipment such as extreme ultraviolet (EUV) lithography systems. To meet the demand for regulating the surface wettability of Mo, this study employs micromilling to fabricate microgroove arrays on Mo surfaces to enhance their hydrophobicity. First, comparative micromilling experiments are conducted under flood cooling and minimum quantity cooling lubrication (MQCL) conditions. The effects of process parameters, including axial depth of cut (ap), spindle speed (n), and feed per tooth (fz), on burr height (H) are investigated under the two cooling/lubrication conditions. The results show that the burr heights obtained under flood cooling are generally lower than those obtained under MQCL. Subsequently, the machining parameters under flood cooling are evaluated using an orthogonal experimental design. A mathematical model relating the microgroove array geometry to the contact angle is then established based on Gibbs free energy to guide the design of surface microgroove structures. Finally, microgroove arrays are fabricated on Mo surfaces using the preferred machining parameters. The results demonstrate that the microgroove arrays effectively enhance the water hydrophobicity of the Mo surface. The static water contact angle increases from 62.45 ± 0.25° for the untreated Mo surface to a maximum of 128.50 ± 0.12°, thereby achieving a transition from hydrophilic to hydrophobic behavior.