Response function calculation and sensitivity comparison analysis of various bimorph deformable mirrors

Analysis of the response function for various possible bimorph-type deformable mirrors is presented by numerical calculation. Using this response function, sensitivity comparison of a five-layer bimorph with two-and three-layer structures is carried out. It is shown that the displacement of a bimorph deformable mirror surface reduces when the number of layers increases, and the displacement is closely related to the distance of the control layer from the median plane. The farther electrode contributes the larger deformation on the surface. Furthermore, for a fixed position of the control layer, the displacement is directly proportional to the loading voltage and inversely proportional to the square of the thickness of the PZT layer, and it increases about 1.4 times when the area of the electrode doubles.