This paper presents a study of effect of cutting conditions on surface quality in FTS machining of optical microstructures such as micro-lens array. A power spectrum analysis is proposed to characterize the surface quality in FTS machining. It is found that there is a strong relationship between the surface roughness and the power spectrum of the surface profile. This provides an important means for the characterization of surface quality in FTS machining of optical microstructures.
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Cheung et al. (2008) studied this question.
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