Simulation of Scanning Electron Microscope Image for Trench Structures

Scanning electron microscope images for trench structures are simulated by calculating electron trajectories with a Monte Carlo method. Electron trajectories both inside and outside the trench are fully simulated. Using this simulation, the natures of the secondary electron image and the backscattered electron image are quantified. The signal variations are shown as functions of the size of the trench, the primary electron energy, and the beam diameter.