The development and processing of hybrid inorganic-organic thin film materials plays a critical role in advancing interdisciplinary sciences and device manufacturing. Here we present a novel approach to synthesize and deposit acrylate-containing organic/inorganic hybrid films. The material is based on a chemical solution and includes specifically desired metal dopants that are fully integrated into the backbone of the polymer structure. The film can be deposited by simple spin coating, and we confer photosensitive properties to the material making it directly patterned by traditional UV photolithography techniques. Film thickness, chemical characterization, and wet/dry etching capability of the film are also investigated. We believe this innovative material has the potential to be used in a broad range of applications for electronic, photonic, biology, and other interdisciplinary fields.
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Han et al. (2009) studied this question.
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