Semiempirical Study of Metastable Alloys Obtained by Ion Implantation in Metals and Semiconductors

The lattice location of atoms implanted at low doses in metals and semiconductors is analysed by constructing a map in which the two coordinates are: a) the difference between the crystalline Wigner-Seitz radii of impurity (I) and host (H), b) the heat of solution (without size mismatch term) of I in H, taken from the theory of Miedema. These two coordinates are formed from three elemental parameters characteristic of each element: Wigner-Seitz radius, electronegativity, and interstitial electron density.