Computer-controlled piezoresistance data-acquisition system

A system for measuring the longitudinal and transverse piezoresistance matrix coefficients as a function of temperature is described. It utilizes a four-point probe for generating uniform tension-compression stresses in the test sample. For thin- and thick-film structures, the substrate elastic compliance s11 must be known to determine the elastroresistance matrix elements. Data acquisition and reduction are performed under full computer control. System architecture, capabilities, and examples of its output relevant to sensor design will be given.