A fast computer-controlled and fully automated deep level transient spectroscopy (DLTS) system is described. Various DLTS techniques can be operated without changing the hardware. Simultaneous data acquisition and data processing considerably reduces the measurement time. The sensitivity of the system is increased by digital compensation of the sample capacitance and by averaging of a high number of transients. All the trap parameters are determined during one temperature scan.
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Hölzlein et al. (1986) studied this question.
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