Self-assembly and sensing-group graft of pre-modified CNTs on resonant micro-cantilevers for specific detection of volatile organic compound vapors

This paper reports MWCNT (multi-wall carbon nano-tube)-modified resonant micro-cantilever chemical sensors for detection of trinitrotoluene (TNT) vapor. The MWCNTs are pre-modified and then area-selectively self-assembled at the free-end gold pad of a micro-cantilever, in which a resonance-exciting heater and a signal-readout piezoresistive Wheatstone bridge are integrated. Featuring a high specific surface area, the MWCNTs are further functionalized with TNT-sensitive groups by grafting onto the sidewalls of the MWCNTs. To lower the non-specific absorption of water and other small organic molecules, the SiO 2 surface of the micro-cantilever was also pre-treated for hydrophobicity and oleophobicity by self-assembling a monolayer of heptadecafluorodecyltrimethoxysilane. The results of our sensing experiments have shown a capability to rapidly detect ppb-level TNT vapor, and a high specificity of the functionalized groups to TNT molecules. The experiment has also confirmed a good long-term stability in detecting sensitivity.