A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

We present an H-shaped resonator made of two clamped-clamped microbeams mechanically coupled at the middle with a strong coupler to achieve, in a single device, mechanical amplification of the response signal, filtering, and frequency conversion simultaneously. Using mechanical amplification combined with combination resonances generated from a mixed-frequency excitation, a wideband tunable filter, and a simultaneous frequency up and down convertors at multiple bands is demonstrated. The proposed coupled structure, when combined with the easy-to-implement technique of frequency mixing, is promising for applications in an RF chain.