FeCo–Zr–O nanogranular soft-magnetic thin films with a high magnetic flux density

Soft-magnetic thin films with high magnetic flux densities of about 23 kG have been fabricated in the (Fe–Co)–Zr–O nanogranular system. The films were prepared by reactive sputtering under an oxygen–argon atmosphere using a target of Fe–Co–Zr alloys. The microstructure was composed of base-centered-cubic Fe–Co nanograins, where nanoparticles of amorphous Zr oxide are dispersed. These Zr-oxide nanoparticles are thought to hinder the growth of Fe–Co grains during the film deposition, causing low coercivity.