The crystallization temperature of typical ferroelectric films such as PbZr 1- X Ti X O 3 (PZT), SrBi 2 Ta 2 O 9 (SBT), and (Bi,La) 4 Ti 3 O 12 (BLT) was found to decrease by 150 to 200°C in a chemical solution deposition method by adding Bi 2 SiO 5 (BSO) in the sol-gel solutions. It was also found that the ferroelectric and insulating characteristics of the BSO-added films were significantly improved by annealing in high-pressure oxygen up to 9.9 atms. Three-orders-of-magnitude improvement of the leakage current density was observed in BSO-added BLT films after annealing at 9.9 atms, while pronounced increase of the saturation polarization level was observed in BSO-added SBT and PZT films. From cross-sectional transmission electron microscopy (TEM) observations, the origin of the improved characteristics was speculated to be the structural change of the films.
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Kijima et al. (2002) studied this question.